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The accelerometer consists of a micromachined silicon mass suspended by multiple beams from a silicon frame. Piezoresistors located in the beams change their resist- ance as the motion of the suspended mass changes the strain in the beams. Silicon caps on the top and the bot- tom of the device are added to provide over-range stops and unusually high shock resistance and durability. As a result of this unique three-layer silicon structure, these accelerometers have a very low profile and low mass and are batch fabricated at a very low cost. An added result of this structure is built-in damping, which allows a wider useable bandwidth to be achieved.